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New Test Structure for Nanometer-Level Overlay and Feature-Placement Metrology

Published

Author(s)

Michael W. Cresswell, Richard A. Allen, Loren W. Linholm, Colleen E. Hood, William B. Penzes
Citation
IEEE Transactions on Semiconductor Manufacturing
Volume
7
Issue
3

Citation

Cresswell, M. , Allen, R. , Linholm, L. , Hood, C. and Penzes, W. (1994), New Test Structure for Nanometer-Level Overlay and Feature-Placement Metrology, IEEE Transactions on Semiconductor Manufacturing (Accessed February 28, 2024)
Created July 31, 1994, Updated October 12, 2021