New Test Structure for Nanometer-Level Overlay and Feature-Placement Metrology

Michael W. Cresswell; Richard A. Allen; Loren W. Linholm; Colleen E. Hood; William B. Penzes

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PUBLICATIONS

New Test Structure for Nanometer-Level Overlay and Feature-Placement Metrology

Published

August 1, 1994

Author(s)

Michael W. Cresswell, Richard A. Allen, Loren W. Linholm, Colleen E. Hood, William B. Penzes

Citation

IEEE Transactions on Semiconductor Manufacturing

Volume

Issue

Pub Type

Journals

Citation

Cresswell, M. , Allen, R. , Linholm, L. , Hood, C. and Penzes, W. (1994), New Test Structure for Nanometer-Level Overlay and Feature-Placement Metrology, IEEE Transactions on Semiconductor Manufacturing (Accessed April 30, 2026)

Additional citation formats

Issues

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Created July 31, 1994, Updated October 12, 2021

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