@article{846516,
  author = {Michael Cresswell and Richard Allen and Loren Linholm and Colleen Hood and William Penzes},
  title = {New Test Structure for Nanometer-Level Overlay and Feature-Placement Metrology},
  year = {1994},
  number = {7},
  month = {1994-08-01 00:08:00},
  publisher = {IEEE Transactions on Semiconductor Manufacturing},
  language = {en},
}