TY  - JOUR
AU  - Michael Cresswell
AU  - Richard Allen
AU  - Loren Linholm
AU  - Colleen Hood
AU  - William Penzes
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 1994-08-01 00:08:00
LA  - en
M1  - 7
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 1994
TI  - New Test Structure for Nanometer-Level Overlay and Feature-Placement Metrology
ER  -