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Neutron Reflectometry, X-Ray Reflectometry, and Spectroscopic Ellipsometry Characterization of Thin SiO2 on Si

Published

Author(s)

Joseph Dura, Curt A. Richter, Charles Majkrzak, Nhan Van Nguyen
Citation
Applied Physics Letters
Volume
73
Issue
15

Citation

Dura, J. , Richter, C. , Majkrzak, C. and Nguyen, N. (1998), Neutron Reflectometry, X-Ray Reflectometry, and Spectroscopic Ellipsometry Characterization of Thin SiO<sub>2</sub> on Si, Applied Physics Letters (Accessed December 5, 2024)

Issues

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Created October 11, 1998, Updated October 12, 2021