Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Neutron Reflectometry, X-Ray Reflectometry, and Spectroscopic Ellipsometry Characterization of Thin SiO2 on Si

Published

Author(s)

Joseph Dura, Curt A. Richter, Charles Majkrzak, Nhan Van Nguyen
Citation
Applied Physics Letters
Volume
73
Issue
15

Citation

Dura, J. , Richter, C. , Majkrzak, C. and Nguyen, N. (1998), Neutron Reflectometry, X-Ray Reflectometry, and Spectroscopic Ellipsometry Characterization of Thin SiO<sub>2</sub> on Si, Applied Physics Letters (Accessed July 21, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created October 11, 1998, Updated October 12, 2021