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PUBLICATIONS

Neutron Reflectometry, X-Ray Reflectometry, and Spectroscopic Ellipsometry Characterization of Thin SiO2 on Si

Published

Author(s)

Joseph Dura, Curt A. Richter, Charles Majkrzak, Nhan Van Nguyen
Citation
Applied Physics Letters
Volume
73
Issue
15
Pub Type
Journals

Citation

Dura, J. , Richter, C. , Majkrzak, C. and Nguyen, N. (1998), Neutron Reflectometry, X-Ray Reflectometry, and Spectroscopic Ellipsometry Characterization of Thin SiO<sub>2</sub> on Si, Applied Physics Letters (Accessed October 1, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created October 11, 1998, Updated October 12, 2021
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