@article{765881,
  author = {Joseph Dura and Curt Richter and Charles Majkrzak and Nhan Nguyen},
  title = {Neutron Reflectometry, X-Ray Reflectometry, and Spectroscopic Ellipsometry Characterization of Thin SiO<sub>2</sub> on Si},
  year = {1998},
  number = {73},
  month = {1998-10-12 00:10:00},
  publisher = {Applied Physics Letters},
  language = {en},
}