National Semiconductor Metrology Program, Project Portfolio, FY 1998

Published

March 1, 1998

Author(s)

Stephen Knight, A D. Settle-Raskin

Abstract

The National Semiconductor Metrology Program (NSMP) is a NIST-wide effort designed to meet the highest priority measurement needs of the semiconductor industry as expressed by the National Technology Roadmap for Semiconductors and other authoritative industry sources. The NSMP was established in 1994 with a strong focus on mainstream silicon CMOS technology and an ultimate funding goal of $25 million annually. Current annual funding of approximately $11 million supports the 24 internal projects which are summarized in this Project Portfolio booklet. The NSMP is operated by NIST's Office of Microelectronics Programs, which also manages NIST's relationships with the Semiconductor Industry Association (SIA), SEMATECH and the Semiconductor Research Corporation. These include NIST's memberships on the SIA committees that develop the Roadmap and numerous SRC technical management committees. In addition, NIST is active in the semiconductor standards development activities of ASTM, Deutsches institut fur Normung, Electronic Industries Association, International Organization for Standardization, and Semiconductor Equipment and Semiconductor Equipment and Materials International.

Citation

NIST Interagency/Internal Report (NISTIR) - 5851

Report Number

5851

NIST Pub Series

NIST Interagency/Internal Report (NISTIR)

Pub Type

NIST Pubs

Keywords

CMOS, NIST, NSMP, semiconductors, SEMATECH, SEMI, SIA, SRC

Citation

Knight, S. and Settle-Raskin, A. (1998), National Semiconductor Metrology Program, Project Portfolio, FY 1998, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD (Accessed April 29, 2026)

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