TY  - GEN
AU  - Knight, Stephen
AU  - Settle-Raskin, A
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1998-03-01 00:03:00
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1998
TI  - National Semiconductor Metrology Program, Project Portfolio, FY 1998
ER  -