Watts, R.
, Ederer, D.
, Lucatorto, T.
and Isaacson, M.
(1991),
National Institute of Standards and Technology Metrology for Soft-X-Ray Multilayer Optics,, Optical Society of America, Washington, DC (Accessed May 1, 2026)
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National Institute of Standards and Technology Metrology for Soft-X-Ray Multilayer Optics,
Published
Author(s)
, D L. Ederer, , M Isaacson
Citation
Soft X-Ray Projection Lithography Technical Digest Series
Publisher Info
Optical Society of America, Washington, DC
Pub Type
Books
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created January 1, 1991, Updated February 17, 2017