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National Institute of Standards and Technology Metrology for Soft-X-Ray Multilayer Optics,

Published

Author(s)

R N. Watts, D L. Ederer, Thomas B. Lucatorto, M Isaacson
Citation
Soft X-Ray Projection Lithography Technical Digest Series
Publisher Info
Optical Society of America, Washington, DC

Citation

Watts, R. , Ederer, D. , Lucatorto, T. and Isaacson, M. (1991), National Institute of Standards and Technology Metrology for Soft-X-Ray Multilayer Optics,, Optical Society of America, Washington, DC (Accessed June 16, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 1991, Updated February 17, 2017