TY - SER AU - R Watts AU - D Ederer AU - Thomas Lucatorto AU - M Isaacson C2 - Optical Society of America, Washington, DC DA - 1991-01-01 LA - en PB - Optical Society of America, Washington, DC PY - 1991 TI - National Institute of Standards and Technology Metrology for Soft-X-Ray Multilayer Optics, ER -