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PUBLICATIONS

National Institute of Standards and Technology Metrology for Soft-X-Ray Multilayer Optics,

Published

Author(s)

R N. Watts, D L. Ederer, Thomas B. Lucatorto, M Isaacson
Citation
Soft X-Ray Projection Lithography
Pub Type
Others

Citation

Watts, R. , Ederer, D. , Lucatorto, T. and Isaacson, M. (1991), National Institute of Standards and Technology Metrology for Soft-X-Ray Multilayer Optics,, Soft X-Ray Projection Lithography (Accessed November 7, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created January 1, 1991, Updated February 17, 2017
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