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National Institute of Standards and Technology Metrology for Soft-X-Ray Multilayer Optics,

Published

Author(s)

R N. Watts, D L. Ederer, Thomas B. Lucatorto, M Isaacson
Citation
Soft X-Ray Projection Lithography

Citation

Watts, R. , Ederer, D. , Lucatorto, T. and Isaacson, M. (1991), National Institute of Standards and Technology Metrology for Soft-X-Ray Multilayer Optics,, Soft X-Ray Projection Lithography (Accessed June 16, 2024)

Issues

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Created January 1, 1991, Updated February 17, 2017