@misc{144476,
  author = {R Watts and D Ederer and Thomas Lucatorto and M Isaacson},
  title = {National Institute of Standards and Technology Metrology for Soft-X-Ray Multilayer Optics,},
  year = {1991},
  month = {1991-01-01},
  publisher = {Soft X-Ray Projection Lithography},
  language = {en},
}