TY  - VIDEO
AU  - R Watts
AU  - D Ederer
AU  - Thomas Lucatorto
AU  - M Isaacson
C2  - Soft X-Ray Projection Lithography
DA  - 1991-01-01
LA  - en
PB  - Soft X-Ray Projection Lithography
PY  - 1991
TI  - National Institute of Standards and Technology Metrology for Soft-X-Ray Multilayer Optics,
ER  -