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Nanomanufacturing of atom-based dimensional standards ::a final project report of the national advanced manufacturing testbed

Published

Author(s)

T V Vorburger, R H Allen, B Damazo, J Fu, D Monk, M Osti, J Pellegrino, R Rhorer, R Russell, R Silver, R Sriram, K Stouffer, D A Swyt, E C Teague, T Wheatley, D Wilmering
Citation
- NIST IR 6850
Report Number
NIST IR 6850

Citation

Vorburger, T. , Allen, R. , Damazo, B. , Fu, J. , Monk, D. , Osti, M. , Pellegrino, J. , Rhorer, R. , Russell, R. , Silver, R. , Sriram, R. , Stouffer, K. , Swyt, D. , Teague, E. , Wheatley, T. and Wilmering, D. (2002), Nanomanufacturing of atom-based dimensional standards ::a final project report of the national advanced manufacturing testbed, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.6850 (Accessed February 23, 2024)
Created January 1, 2002, Updated May 20, 2023