@misc{1141316,
  author = {T V Vorburger and R H Allen and B Damazo and J Fu and D Monk and M Osti and J Pellegrino and R Rhorer and R Russell and R Silver and R Sriram and K Stouffer and D A Swyt and E C Teague and T Wheatley and D Wilmering},
  title = {Nanomanufacturing of atom-based dimensional standards ::a final project report of the national advanced manufacturing testbed},
  year = {2002},
  month = {2002-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.6850},
  language = {en},
}