TY  - GEN
AU  - T V Vorburger
AU  - R H Allen
AU  - B Damazo
AU  - J Fu
AU  - D Monk
AU  - M Osti
AU  - J Pellegrino
AU  - R Rhorer
AU  - R Russell
AU  - R Silver
AU  - R Sriram
AU  - K Stouffer
AU  - D A Swyt
AU  - E C Teague
AU  - T Wheatley
AU  - D Wilmering
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2002-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.6850
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2002
TI  - Nanomanufacturing of atom-based dimensional standards ::a final project report of the national advanced manufacturing testbed
ER  -