Stavis, S.
, Strychalski, E.
and Gaitan, M.
(2009),
Nanofluidic Structures with Complex Three Dimensional Surfaces, Nanotechnology, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=33163
(Accessed October 8, 2024)
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Nanofluidic Structures with Complex Three Dimensional Surfaces
Published
Author(s)
, Elizabeth Strychalski,
Abstract
A fabrication process was developed to construct nanofluidic devices with complex three dimensional (3D) topographies. A single layer of grayscale photolithography enabled arbitrary and simultaneous control of numerous nanoscale etch depths in a fused silica substrate, and glass wafer bonding was used to form enclosed nanofluidic structures with depths varying from (11 ± 4) nm to (624 ± 7) nm (μ ± σ). Fluorescent nanoparticles and biopolymers were manipulated in a 3D test structure.Citation
Nanotechnology
Issue
20
Pub Type
Journals
Download Paper
Keywords
Nanofluidic, DNA, Single Molecule, Separation, Grayscale, Graytone, Photolithography
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created March 31, 2009, Updated February 19, 2017