Skip to main content
U.S. flag

An official website of the United States government

Dot gov

The .gov means it’s official.
Federal government websites often end in .gov or .mil. Before sharing sensitive information, make sure you’re on a federal government site.

Https

The site is secure.
The https:// ensures that you are connecting to the official website and that any information you provide is encrypted and transmitted securely.

Nanofluidic Structures with Complex Three Dimensional Surfaces

Published

Author(s)

Samuel M. Stavis, Elizabeth Strychalski, Michael Gaitan

Abstract

A fabrication process was developed to construct nanofluidic devices with complex three dimensional (3D) topographies. A single layer of grayscale photolithography enabled arbitrary and simultaneous control of numerous nanoscale etch depths in a fused silica substrate, and glass wafer bonding was used to form enclosed nanofluidic structures with depths varying from (11 ± 4) nm to (624 ± 7) nm (μ ± σ). Fluorescent nanoparticles and biopolymers were manipulated in a 3D test structure.
Citation
Nanotechnology
Issue
20

Keywords

Nanofluidic, DNA, Single Molecule, Separation, Grayscale, Graytone, Photolithography
Created March 31, 2009, Updated February 19, 2017