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Nanofluidic Structures with Complex Three Dimensional Surfaces

Published

Author(s)

Samuel M. Stavis, Elizabeth Strychalski, Michael Gaitan

Abstract

A fabrication process was developed to construct nanofluidic devices with complex three dimensional (3D) topographies. A single layer of grayscale photolithography enabled arbitrary and simultaneous control of numerous nanoscale etch depths in a fused silica substrate, and glass wafer bonding was used to form enclosed nanofluidic structures with depths varying from (11 ± 4) nm to (624 ± 7) nm (μ ± σ). Fluorescent nanoparticles and biopolymers were manipulated in a 3D test structure.
Citation
Nanotechnology
Issue
20

Keywords

Nanofluidic, DNA, Single Molecule, Separation, Grayscale, Graytone, Photolithography

Citation

Stavis, S. , Strychalski, E. and Gaitan, M. (2009), Nanofluidic Structures with Complex Three Dimensional Surfaces, Nanotechnology, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=33163 (Accessed June 23, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created March 31, 2009, Updated February 19, 2017