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MOTIS: A Focused Ion Beam Source Based On Laser-Cooled Atoms

Published

Author(s)

Brenton J. Knuffman, Adam V. Steele, Jon Orloff, Mostafa Maazouz, Jabez J. McClelland

Abstract

MOTIS: A Focused Ion Beam Source Based On Laser-Cooled Atoms
Volume
1395
Issue
1
Conference Dates
May 23-26, 2011
Conference Location
Grenoble, FR
Conference Title
Frontiers of Characterization and Metrology for Nanoelectronics

Keywords

Focused ion beam, ion microscopy, laser cooling.

Citation

Knuffman, B. , Steele, A. , Orloff, J. , Maazouz, M. and McClelland, J. (2011), MOTIS: A Focused Ion Beam Source Based On Laser-Cooled Atoms, Frontiers of Characterization and Metrology for Nanoelectronics, Grenoble, FR, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908476 (Accessed July 7, 2022)
Created November 9, 2011, Updated October 12, 2021