TY  - CONF
AU  - Brenton Knuffman
AU  - Adam Steele
AU  - Jon Orloff
AU  - Mostafa Maazouz
AU  - Jabez McClelland
C2  - Frontiers of Characterization and Metrology for Nanoelectronics, Grenoble, FR
DA  - 2011-11-10 00:11:00
LA  - en
M1  - 1395
PB  - Frontiers of Characterization and Metrology for Nanoelectronics, Grenoble, FR
PY  - 2011
TI  - MOTIS: A Focused Ion Beam Source Based On Laser-Cooled Atoms
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908476
ER  -