@conference{788476,
  author = {Brenton Knuffman and Adam Steele and Jon Orloff and Mostafa Maazouz and Jabez McClelland},
  title = {MOTIS: A Focused Ion Beam Source Based On Laser-Cooled Atoms},
  year = {2011},
  number = {1395},
  month = {2011-11-10 00:11:00},
  publisher = {Frontiers of Characterization and Metrology for Nanoelectronics, Grenoble, FR},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908476},
  language = {en},
}