Villarrubia, J.
, Ritchie, N.
and Lowney, J.
(2007),
Monte Carlo Modeling of Secondary Electron Imaging in Three Dimensions, Proceedings of SPIE, Volume 6518, San Jose, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=913838
(Accessed January 20, 2025)
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Monte Carlo Modeling of Secondary Electron Imaging in Three Dimensions
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Proceedings Title
Proceedings of SPIE, Volume 6518
Volume
6518
Conference Dates
February 26-March 1, 2007
Conference Location
San Jose, CA
Conference Title
Metrology, Inspection, and Process Control for Microlithography XXI
Pub Type
Conferences
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Created March 1, 2007, Updated February 19, 2017