TY  - CONF
AU  - John Villarrubia
AU  - Nicholas Ritchie
AU  - J Lowney
C2  - Proceedings of SPIE, Volume 6518, San Jose, CA
DA  - 2007-03-01
LA  - en
M1  - 6518
PB  - Proceedings of SPIE, Volume 6518, San Jose, CA
PY  - 2007
TI  - Monte Carlo Modeling of Secondary Electron Imaging in Three Dimensions
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=913838
ER  -