@conference{27001, author = {John Villarrubia and Nicholas Ritchie and J Lowney}, title = {Monte Carlo Modeling of Secondary Electron Imaging in Three Dimensions}, year = {2007}, number = {6518}, month = {2007-03-01}, publisher = {Proceedings of SPIE, Volume 6518, San Jose, CA}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=913838}, language = {en}, }