Krause, S.
, Visitserngtrakul, S.
, Cordts, B.
and Roitman, P.
(1990),
Microstructural Evolution of Oxides During Processing of Oxygen Implanted SOI Material, Extended Abstract, 1990 IEEE SOS/SOI Technology Conference, Key West, FL, USA
(Accessed May 16, 2024)
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Microstructural Evolution of Oxides During Processing of Oxygen Implanted SOI Material
Published
Author(s)
S. J. Krause, S. Visitserngtrakul, B. F. Cordts,
Proceedings Title
Extended Abstract, 1990 IEEE SOS/SOI Technology Conference
Conference Dates
October 2-4, 1990
Conference Location
Key West, FL, USA
Pub Type
Conferences
Citation
Issues
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Created December 30, 1990, Updated October 12, 2021