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Microstructural Evolution of Oxides During Processing of Oxygen Implanted SOI Material

Published

Author(s)

S. J. Krause, S. Visitserngtrakul, B. F. Cordts, Peter Roitman
Proceedings Title
Extended Abstract, 1990 IEEE SOS/SOI Technology Conference
Conference Dates
October 2-4, 1990
Conference Location
Key West, FL, USA

Citation

Krause, S. , Visitserngtrakul, S. , Cordts, B. and Roitman, P. (1990), Microstructural Evolution of Oxides During Processing of Oxygen Implanted SOI Material, Extended Abstract, 1990 IEEE SOS/SOI Technology Conference, Key West, FL, USA (Accessed July 21, 2024)

Issues

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Created December 30, 1990, Updated October 12, 2021