TY  - CONF
AU  - Krause, S.
AU  - Visitserngtrakul, S.
AU  - Cordts, B.
AU  - Roitman, Peter
C2  - Extended Abstract, 1990 IEEE SOS/SOI Technology Conference, Key West, FL, USA
DA  - 1990-12-31 00:12:00
LA  - en
PB  - Extended Abstract, 1990 IEEE SOS/SOI Technology Conference, Key West, FL, USA
PY  - 1990
TI  - Microstructural Evolution of Oxides During Processing of Oxygen Implanted SOI Material
ER  -