@conference{767791,
  author = {S. Krause and S. Visitserngtrakul and B. Cordts and Peter Roitman},
  title = {Microstructural Evolution of Oxides During Processing of Oxygen Implanted SOI Material},
  year = {1990},
  month = {1990-12-31 00:12:00},
  publisher = {Extended Abstract, 1990 IEEE SOS/SOI Technology Conference, Key West, FL, USA},
  language = {en},
}