Park, J.
, Krause, S.
and Roitman, P.
(1991),
Microstructural Changes in Oxygen Implanted SOI Material at Intermediate Annealing Steps in Thermal Ramping, Extended Abstract, Proc., 1991 IEEE International SOI Conference, Vail Valley, CO, USA
(Accessed December 14, 2024)
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Microstructural Changes in Oxygen Implanted SOI Material at Intermediate Annealing Steps in Thermal Ramping
Published
Author(s)
J Park, S. J. Krause,
Proceedings Title
Extended Abstract, Proc., 1991 IEEE International SOI Conference
Conference Dates
October 1-3, 1991
Conference Location
Vail Valley, CO, USA
Pub Type
Conferences
Citation
Issues
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Created December 30, 1991, Updated October 12, 2021