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Microstructural Changes in Oxygen Implanted SOI Material at Intermediate Annealing Steps in Thermal Ramping

Published

Author(s)

J Park, S. J. Krause, Peter Roitman
Proceedings Title
Extended Abstract, Proc., 1991 IEEE International SOI Conference
Conference Dates
October 1-3, 1991
Conference Location
Vail Valley, CO, USA

Citation

Park, J. , Krause, S. and Roitman, P. (1991), Microstructural Changes in Oxygen Implanted SOI Material at Intermediate Annealing Steps in Thermal Ramping, Extended Abstract, Proc., 1991 IEEE International SOI Conference, Vail Valley, CO, USA (Accessed April 16, 2024)
Created December 30, 1991, Updated October 12, 2021