TY - CONF AU - J Park AU - S. Krause AU - Peter Roitman C2 - Extended Abstract, Proc., 1991 IEEE International SOI Conference, Vail Valley, CO, USA DA - 1991-12-31 00:12:00 LA - en PB - Extended Abstract, Proc., 1991 IEEE International SOI Conference, Vail Valley, CO, USA PY - 1991 TI - Microstructural Changes in Oxygen Implanted SOI Material at Intermediate Annealing Steps in Thermal Ramping ER -