@conference{767276,
  author = {J Park and S. Krause and Peter Roitman},
  title = {Microstructural Changes in Oxygen Implanted SOI Material at Intermediate Annealing Steps in Thermal Ramping},
  year = {1991},
  month = {1991-12-31 00:12:00},
  publisher = {Extended Abstract, Proc., 1991 IEEE International SOI Conference, Vail Valley, CO, USA},
  language = {en},
}