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Micromachined Thermal Radiation Emitter from a Commercial CMOS Process

Published

Author(s)

M. Parameswaran, A. M. Robinson, David L. Blackburn, Michael Gaitan, Jon Geist
Citation
IEEE Electron Device Letters
Volume
12
Issue
2

Citation

Parameswaran, M. , Robinson, A. , Blackburn, D. , Gaitan, M. and Geist, J. (1991), Micromachined Thermal Radiation Emitter from a Commercial CMOS Process, IEEE Electron Device Letters (Accessed April 19, 2024)
Created January 31, 1991, Updated October 12, 2021