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Micromachined Thermal Radiation Emitter from a Commercial CMOS Process
Published
Author(s)
M. Parameswaran, A. M. Robinson, David L. Blackburn, Michael Gaitan, Jon Geist
Citation
IEEE Electron Device Letters
Volume
12
Issue
2
Pub Type
Journals
Citation
Parameswaran, M.
, Robinson, A.
, Blackburn, D.
, Gaitan, M.
and Geist, J.
(1991),
Micromachined Thermal Radiation Emitter from a Commercial CMOS Process, IEEE Electron Device Letters
(Accessed June 7, 2023)