@article{771006, author = {M. Parameswaran and A. Robinson and David Blackburn and Michael Gaitan and Jon Geist}, title = {Micromachined Thermal Radiation Emitter from a Commercial CMOS Process}, year = {1991}, number = {12}, month = {1991-02-01 00:02:00}, publisher = {IEEE Electron Device Letters}, language = {en}, }