Ono, R.
and Beall, J.
(1989),
Microlithography and Patterning of High-T<sub>c</sub> Thin Films, Proc., Third Intl. Sample Electronic Materials and Processes Conf., Los Angeles, CA, USA
(Accessed December 8, 2024)
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.