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Microlithography and Patterning of High-Tc Thin Films

Published

Author(s)

Ronald H. Ono, James A. Beall
Proceedings Title
Proc., Third Intl. Sample Electronic Materials and Processes Conf.
Conference Location
Los Angeles, CA, USA

Citation

Ono, R. and Beall, J. (1989), Microlithography and Patterning of High-T<sub>c</sub> Thin Films, Proc., Third Intl. Sample Electronic Materials and Processes Conf., Los Angeles, CA, USA (Accessed February 24, 2024)
Created December 30, 1989, Updated October 12, 2021