TY  - CONF
AU  - Ronald Ono
AU  - James Beall
C2  - Proc., Third Intl. Sample Electronic Materials and Processes Conf., Los Angeles, CA, USA
DA  - 1989-12-31 00:12:00
LA  - en
PB  - Proc., Third Intl. Sample Electronic Materials and Processes Conf., Los Angeles, CA, USA
PY  - 1989
TI  - Microlithography and Patterning of High-T<sub>c</sub> Thin Films
ER  -