@conference{780836,
  author = {Ronald Ono and James Beall},
  title = {Microlithography and Patterning of High-T<sub>c</sub> Thin Films},
  year = {1989},
  month = {1989-12-31 00:12:00},
  publisher = {Proc., Third Intl. Sample Electronic Materials and Processes Conf., Los Angeles, CA, USA},
  language = {en},
}