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Microhotplate Temperature Control for Sensor Fabrication, Study and Operation

Published

Author(s)

Richard E. Cavicchi, John S. Suehle, P Chaparala, G. Poirier, Kenneth G. Kreider, Michael Gaitan, Stephen Semancik
Proceedings Title
Proc., Fifth International Meeting on Chemical Sensors
Conference Dates
July 11-14, 1994
Conference Location
Rome, 1, IT

Citation

Cavicchi, R. , Suehle, J. , Chaparala, P. , Poirier, G. , Kreider, K. , Gaitan, M. and Semancik, S. (1994), Microhotplate Temperature Control for Sensor Fabrication, Study and Operation, Proc., Fifth International Meeting on Chemical Sensors, Rome, 1, IT (Accessed April 18, 2024)
Created December 30, 1994, Updated October 12, 2021