@conference{766841, author = {Richard Cavicchi and John Suehle and P Chaparala and G. Poirier and Kenneth Kreider and Michael Gaitan and Stephen Semancik}, title = {Microhotplate Temperature Control for Sensor Fabrication, Study and Operation}, year = {1994}, month = {1994-12-31 00:12:00}, publisher = {Proc., Fifth International Meeting on Chemical Sensors, Rome, 1, IT}, language = {en}, }