TY - CONF AU - Richard Cavicchi AU - John Suehle AU - P Chaparala AU - G. Poirier AU - Kenneth Kreider AU - Michael Gaitan AU - Stephen Semancik C2 - Proc., Fifth International Meeting on Chemical Sensors, Rome, 1, IT DA - 1994-12-31 00:12:00 LA - en PB - Proc., Fifth International Meeting on Chemical Sensors, Rome, 1, IT PY - 1994 TI - Microhotplate Temperature Control for Sensor Fabrication, Study and Operation ER -