Kim, J.
, Linholm, L.
, Barley, B.
, Hanes, M.
and Cresswell, M.
(1988),
A Microelectronic Test Structure for Thickness Determination of Homogeneous Conducting Thin Films in VLSI Processing, Proc., IEEE International Conference on Microelectronic Test Structures, Long Beach, CA, USA
(Accessed May 4, 2024)
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A Microelectronic Test Structure for Thickness Determination of Homogeneous Conducting Thin Films in VLSI Processing
Published
Author(s)
, , B. L. Barley, M. H. Hanes,
Proceedings Title
Proc., IEEE International Conference on Microelectronic Test Structures
Conference Dates
February 22-23, 1988
Conference Location
Long Beach, CA, USA
Pub Type
Conferences
Citation
Created December 30, 1988, Updated October 12, 2021