@conference{766511,
  author = {Jin Kim and Loren Linholm and B. Barley and M. Hanes and Michael Cresswell},
  title = {A Microelectronic Test Structure for Thickness Determination of Homogeneous Conducting Thin Films in VLSI Processing},
  year = {1988},
  month = {1988-12-31 00:12:00},
  publisher = {Proc., IEEE International Conference on Microelectronic Test Structures, Long Beach, CA, USA},
  language = {en},
}