TY  - CONF
AU  - Jin Kim
AU  - Loren Linholm
AU  - B. Barley
AU  - M. Hanes
AU  - Michael Cresswell
C2  - Proc., IEEE International Conference on Microelectronic Test Structures, Long Beach, CA, USA
DA  - 1988-12-31 00:12:00
LA  - en
PB  - Proc., IEEE International Conference on Microelectronic Test Structures, Long Beach, CA, USA
PY  - 1988
TI  - A Microelectronic Test Structure for Thickness Determination of Homogeneous Conducting Thin Films in VLSI Processing
ER  -