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Metrology for the Semiconductor Industry



Robert I. Scace
NIST Interagency/Internal Report (NISTIR) -


Scace, R. (1991), Metrology for the Semiconductor Industry, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD (Accessed April 20, 2024)
Created September 30, 1991, Updated February 17, 2017