TY - GEN AU - Robert Scace C2 - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD DA - 1991-09-30 LA - en PB - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD PY - 1991 TI - Metrology for the Semiconductor Industry ER -