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Metrological implications of recent interferometric wavelength measurements for singly ionized silicon in the vacuum ultraviolet (152 nm and 180 nm)
Published
Author(s)
Joseph Reader
Citation
Metrologia
Volume
39
Pub Type
Journals
Citation
Reader, J.
(2002),
Metrological implications of recent interferometric wavelength measurements for singly ionized silicon in the vacuum ultraviolet (152 nm and 180 nm), Metrologia
(Accessed October 12, 2025)