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Metrological implications of recent interferometric wavelength measurements for singly ionized silicon in the vacuum ultraviolet (152 nm and 180 nm)

Published

Author(s)

Joseph Reader
Citation
Metrologia
Volume
39

Citation

Reader, J. (2002), Metrological implications of recent interferometric wavelength measurements for singly ionized silicon in the vacuum ultraviolet (152 nm and 180 nm), Metrologia (Accessed April 14, 2024)
Created January 1, 2002, Updated February 17, 2017