Marshall, J.
, Parameswaran, M.
, Zaghloul, M.
and Gaitan, M.
(1992),
Methodology for the computer-aided design of silicon micromachined devices in a standard CMOS process:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.4845
(Accessed December 7, 2024)
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Methodology for the computer-aided design of silicon micromachined devices in a standard CMOS process:
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- NIST IR 4845
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NIST IR 4845
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NIST Pubs
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Created January 1, 1992, Updated May 19, 2023