@misc{1148121,
  author = {Janet C Marshall and M Parameswaran and Mona E Zaghloul and Michael Gaitan},
  title = {Methodology for the computer-aided design of silicon micromachined devices in a standard CMOS process:},
  year = {1992},
  month = {1992-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.4845},
  language = {en},
}