TY  - GEN
AU  - Janet C Marshall
AU  - M Parameswaran
AU  - Mona E Zaghloul
AU  - Michael Gaitan
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1992-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.4845
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1992
TI  - Methodology for the computer-aided design of silicon micromachined devices in a standard CMOS process:
ER  -