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Method for Measuring Axis Orthogonality in MEMS Accelerometers



Craig D. McGray, Muhammad Y. Afridi, Jon C. Geist


A method is described for the computation of axis orthogonality errors in 3-axis accelerometers, based on the application of gravitational force at known angles. A precision two-axis articulated gimbal system is used to control the angle at which the gravitational force acts on the accelerometer, while accelerometry data are collected at each applied angle. The resulting data are fit to a multivariate polynomial, and the coefficients of the linear terms are used to calculate the direction of each axis of the accelerometer and the angle between each axis pair.
NIST Interagency/Internal Report (NISTIR) - 7925
Report Number


Accelerometer, MEMS, Orthogonality, Measurement, Calibration


McGray, C. , Afridi, M. and Geist, J. (2013), Method for Measuring Axis Orthogonality in MEMS Accelerometers, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD, [online], (Accessed May 21, 2024)


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Created July 15, 2013, Updated November 10, 2018