@misc{25096, author = {Craig McGray and Muhammad Afridi and Jon Geist}, title = {Method for Measuring Axis Orthogonality in MEMS Accelerometers}, year = {2013}, month = {2013-07-15}, publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NIST.IR.7925}, language = {en}, }