McGray, C.
, Stavis, S.
, Giltinan, J.
, Eastman, E.
, Firebaugh, S.
, , J.
, Geist, J.
and Gaitan, M.
(2012),
MEMS Kinematics by Super-Resolution Fluorescence Microscopy, IEEE Journal of Microelectromechanical Systems, [online], https://doi.org/10.1109/JMEMS.2012.2216506
(Accessed October 7, 2024)