TY  - JOUR
AU  - Craig McGray
AU  - Samuel Stavis
AU  - Joshua Giltinan
AU  - Eric Eastman
AU  - Samara Firebaugh
AU  - Jenelle
AU  - Jon Geist
AU  - Michael Gaitan
C2  - IEEE Journal of Microelectromechanical Systems
DA  - 2012-09-27
DO  - https://doi.org/10.1109/JMEMS.2012.2216506
LA  - en
PB  - IEEE Journal of Microelectromechanical Systems
PY  - 2012
TI  - MEMS Kinematics by Super-Resolution Fluorescence Microscopy
ER  -