@article{10041, author = {Craig McGray and Samuel Stavis and Joshua Giltinan and Eric Eastman and Samara Firebaugh and Jenelle and Jon Geist and Michael Gaitan}, title = {MEMS Kinematics by Super-Resolution Fluorescence Microscopy}, year = {2012}, month = {2012-09-27}, publisher = {IEEE Journal of Microelectromechanical Systems}, doi = {https://doi.org/10.1109/JMEMS.2012.2216506}, language = {en}, }